Self-consistent spatio-temporal simulation of pulsed microwave discharge

被引：15

作者：

Bonaventura, Z. ^{[1
]}

Trunec, D. ^{[1
]}

Mesko, M. ^{[1
]}

Vasina, P. ^{[1
]}

Kudrle, V. ^{[1
]}

机构：

[1] Masaryk Univ, Fac Sci, Dept Phys Elect, CS-61137 Brno, Czech Republic

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2008年 / 41卷 / 01期

关键词：

D O I：

10.1088/0022-3727/41/1/015210

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A spatio-temporal theoretical model of pulsed microwave discharge was developed. This model is based on the macroscopic continuity equation for electrons and on the wave equation for an electromagnetic wave passing through the discharge plasma. These equations were solved together and in a self-consistent manner. For simplicity, the continuity equation was solved in one dimension only and the electromagnetic wave was assumed to be plane and transversal. Both equations were solved numerically and the spatio-temporal dependences of electron concentration and the amplitude of the microwave electric field were obtained. It was found that the discharge development depends, significantly, on the initial spatial distribution of electron concentration. Two different cases were studied: the discharge development during the first microwave pulse only and after several successive pulses. The calculations were performed particularly for the discharge in nitrogen. The results were compared with experimental data from our previous work.

引用

页数：9

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