Influence of lattice constraint from InN and GaN substrate on relationship between input mole ratio and solid composition of InGaN during MOVPE

被引:4
作者
Kangawa, Y [1 ]
Ito, T [1 ]
Kumagai, Y [1 ]
Koukitu, A [1 ]
机构
[1] Tokyo Univ Agr & Technol, Dept Appl Chem, Koganei, Tokyo 1848588, Japan
来源
5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS | 2003年 / 0卷 / 07期
关键词
D O I
10.1002/pssc.200303538
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Thermodynamic analyses incorporating the contribution of lattice constraint from the substrates were carried out to understand the relationship between input In mole ratio and solid composition of stress-free InGaN, InGaN on GaN and InGaN on InN during metalorganic vapour phase epitaxy. The calculated results suggest that a compositionally unstable region is found at the InN-rich region for InGaN on GaN at high temperatures, while that for InGaN on InN can be seen at the GaN-rich region due to the lattice constraint from the substrate. These results imply that incorporating the contribution of lattice constraint is indispensable to predict the thermodynamic properties of such materials. (C) 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:2575 / 2579
页数:5
相关论文
共 19 条
[1]  
Davydov VY, 2002, PHYS STATUS SOLIDI B, V229, pR1, DOI 10.1002/1521-3951(200202)229:3<R1::AID-PSSB99991>3.0.CO
[2]  
2-O
[3]   Solid phase immiscibility in GaInN [J].
Ho, IH ;
Stringfellow, GB .
APPLIED PHYSICS LETTERS, 1996, 69 (18) :2701-2703
[4]   RECENT PROGRESS IN COMPUTER-AIDED MATERIALS DESIGN FOR COMPOUND SEMICONDUCTORS [J].
ITO, T .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (10) :4845-4886
[5]   Anomalous behavior of excess energy curves of InxGa1-xN grown on GaN and InN [J].
Kangawa, Y ;
Ito, T ;
Mori, A ;
Koukitu, A .
JOURNAL OF CRYSTAL GROWTH, 2000, 220 (04) :401-404
[6]  
Karpov SY, 1998, MRS INTERNET J N S R, V3
[7]   Thermodynamic analysis of InxGa1-xN alloy composition grown by metalorganic vapor phase epitaxy [J].
Koukitu, A ;
Takahashi, N ;
Taki, T ;
Seki, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (6A) :L673-L675
[8]   THERMODYNAMIC ANALYSIS OF MOLECULAR-BEAM EPITAXY OF II-VI-SEMICONDUCTORS [J].
KOUKITU, A ;
NAKAI, H ;
SUZUKI, T ;
SEKI, H .
JOURNAL OF CRYSTAL GROWTH, 1987, 84 (03) :425-430
[9]   Thermodynamic analysis of the MOVPE growth of InxGa1-xN [J].
Koukitu, A ;
Takahashi, N ;
Taki, T ;
Seki, H .
JOURNAL OF CRYSTAL GROWTH, 1997, 170 (1-4) :306-311
[10]   Thermodynamic analysis on molecular beam epitaxy of GaN, InN and AlN [J].
Koukitu, A ;
Seki, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (6B) :L750-L753