Calibration procedure for temperature measurements by thermoreflectance under high magnification conditions

被引：70

作者：

Dilhaire, S ^{[1
]}

Grauby, S ^{[1
]}

Claeys, W ^{[1
]}

机构：

[1] Univ Bordeaux 1, CPMOH, F-33405 Talence, France

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 05期

关键词：

D O I：

10.1063/1.1645326

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We show that, in thermoreflectance measurements under high focusing conditions, the signal is not only due to the surface temperature variations. Indeed, the reflected light from the device under test interferes with the incoming one, making a parasitic Fabry-Perot. Besides, the motion of the sample surface induced, for example, by Joule heating, can produce an additional signal superimposed on the thermoreflectance one. Consequently, reliable thermoreflectance measurements under high focusing conditions, and particularly their calibration, demand a control of the distance between the objective and the sample. Using a servo loop to maintain the distance between the objective and the device constant, thermoreflectance measurements have been made in transient regime on an electronic device and the thermoreflectance coefficient of gold has been deduced. (C) 2004 American Institute of Physics.

引用

页码：822 / 824

页数：3

共 8 条

[1]

BARDON JP, 1998, THERMAL MANAGEMENT E, V58

[2]

Grauby S, 2001, ANAL SCI, V17, pS67

[3] Modelling and experimental study of heat deposition and transport in a semiconductor laser diode [J].