[1] Tianjin Univ, State Key Lab Precis Measuring Technol, Tianjin 300072, Peoples R China
[2] Tianjin Univ, Instruments Ctr MicroNano Mfg Technol, Tianjin 300072, Peoples R China
[3] Tianjin MicroNano Mfg Tech Co Ltd, TEDA, Tianjin 300457, Peoples R China
[4] Civil Aviat Univ China, Airport Coll, Tianjin 300300, Peoples R China