Nano-scale elastic property changes of ion-implanted graphite

被引：2
作者：
Ogiso, H
Nakano, S
Tokumoto, H
Yamanaka, K
机构：
[1] AIST, MITI, Natl Inst Adv Interdisciplinary Res, Tsukuba, Ibaraki, Japan
[2] AIST, MITI, Mech Engn Lab, Tsukuba, Ibaraki 3058564, Japan
[3] Tohoku Univ, Dept Mat Proc, Sendai, Miyagi, Japan
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2001年 / 175卷
关键词：
ion implantation; scanning probe microscopy; elastic property; graphite;
D O I：
10.1016/S0168-583X(00)00656-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The authors discuss changes in the elastic properties of graphite surfaces by ion irradiation. The elastic properties were estimated by measuring the frequency characteristics of a cantilever in contact with the graphite surface. This method enabled us to observe the spatial distribution of the elastic properties at nanometer order resolution. Graphite samples were implanted with 3.1 MeV Au ions, each dose was 1 x 10(13), 1 x 10(14) and 1 x 10(15) cm(-2). Consequently, we found that the ion-implanted graphite surfaces had fine structures in their elastic properties. The observed structures did not always coincide with the topography. At a dose of 1 x 10(13) cm(-2), the stiffness of the graphite was the largest, then decreased as the dose increased. (C) 2001 Elsevier Science B,V. All rights reserved.
引用
收藏
页码：641 / 646
页数：6
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