A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers

被引：65

作者：

Sun, Hongzhi ^{[1
]}

Fang, Deyou ^{[2
]}

Jia, Kemiao ^{[2
]}

Maarouf, Fares ^{[3
]}

Qu, Hongwei ^{[4
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] Freescale Semicond, Tempe, AZ 85284 USA

[3] Qualcomm, San Diego, CA 92121 USA

[4] Oakland Univ, Dept Elect & Comp Engn, Rochester, MI 48309 USA

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 04期

关键词：

Accelerometer; capacitive sensing; chopper stabilization; complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS); dual-chopper amplifier (DCA); microelectromechanical systems (MEMS); monolithic integration; 3-AXIS ACCELEROMETER;

D O I：

10.1109/JSEN.2010.2064296

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metal-oxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 mu g/root Hz in the x- and y-axis and 130 mu g/root Hz in the z-axis, and the power consumption is about 1 mW per axis.

引用

页码：925 / 933

页数：9

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