Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis

被引:0
作者
Guo, Xin [1 ]
Lai, Yongjun [1 ]
Xie, Kongying [1 ]
Campbell, Robert J. [2 ,3 ]
机构
[1] Queens Univ, Dept Mech & Mat Engn, Kingston, ON K7L 3N6, Canada
[2] Queens Univ, Dept Ophthalmol, Kingston, ON K7L 3N6, Canada
[3] Hop Hotel Dieu, Kingston, ON K7L 5G2, Canada
来源
NEMS/MEMS TECHNOLOGY AND DEVICES | 2011年 / 254卷
关键词
Microfluidics; MEMS; AC Electro-osmosis;
D O I
10.4028/www.scientific.net/AMR.254.78
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel 3D discrete T-shaped electrode array, fabricated by PolymMUMPs, is presented for pumping microscale liquid utilizing AC electro-osmosis (ACEO). Both the theoretical and experimental work has been carried out to evaluate the new design concept. A 3D finite element model of a unit cell incorporating a pair of electrodes is created to simulate pump performance. The new design is prototyped using the PolyMUMPs process and the experimental evaluation of its performance is conducted with saline solution at three different voltages. The maximum velocity obtained from the tracing particles at 30 mu m above the bottom of the channel was 90 mu m/s, 130 mu m/s and 200 mu m/s for a voltage of 6Vpp, 8Vpp and 10Vpp respectively.
引用
收藏
页码:78 / +
页数:2
相关论文
共 12 条
[1]   Theoretical prediction of fast 3D AC electro-osmotic pumps [J].
Bazant, Martin Z. ;
Ben, Yuxing .
LAB ON A CHIP, 2006, 6 (11) :1455-1461
[2]   Induced-charge electrokinetic phenomena: Theory and microfluidic applications [J].
Bazant, MZ ;
Squires, TM .
PHYSICAL REVIEW LETTERS, 2004, 92 (06) :661011-661014
[3]  
Gonzalez A., 2000, PHYS REV E, V61
[4]  
Green N.G., PHYS REV E, V66
[5]   Microfluidic image cytometry for measuring number and sizes of biological cells flowing through a microchannel using the micro-PIV technique [J].
Hirono, T. ;
Arimoto, H. ;
Okawa, S. ;
Yamada, Y. .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2008, 19 (02)
[6]  
Hunter R. J., 1981, ZETA POTENTIAL COLLO, DOI DOI 10.1016/C2013-0-07389-6
[7]  
LEVICH VG, 1962, PHYSICOCHEM HYDRODYN, P472
[8]   AC electric-field-induced fluid flow in microelectrodes [J].
Ramos, A ;
Morgan, H ;
Green, NG ;
Castellanos, A .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1999, 217 (02) :420-422
[9]   Engineering flows in small devices: Microfluidics toward a lab-on-a-chip [J].
Stone, HA ;
Stroock, AD ;
Ajdari, A .
ANNUAL REVIEW OF FLUID MECHANICS, 2004, 36 :381-411
[10]   The effect of step height on the performance of three-dimensional ac electro-osmotic microfluidic pumps [J].
Urbanski, John Paul ;
Levitan, Jeremy A. ;
Burch, Damian N. ;
Thorsen, Todd ;
Bazant, Martin Z. .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2007, 309 (02) :332-341