Measurement of plasma characteristics of the hollow cathode discharge

被引：5

作者：

Lee, JH ^{[1
]}

Jeong, KJ

机构：

[1] Bon Elect Co Ltd, Taejon 306130, South Korea

[2] Deajeon Univ, Dept Elect Mat Sci, Taejon 300716, South Korea

来源：

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 2003年 / 72卷 / 10期

关键词：

plasma temperature; emission intensity; negative glow; hollow cathode;

D O I：

10.1143/JPSJ.72.2530

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The argon temperature and the emission intensity in the hollow cathode discharge were measured. We measured the line profiles of the 1s(5)-2p(8) transition in argon, using a single-frequency diode laser. Low power diode lasers have been used to investigate the line profiles of argon transitions in hollow cathode discharges. It turns out that the argon temperature is 640-783 K in the discharge current range of 7.00-10.0 mA. The emission intensity is uniform in the negative glow at the current range over 5.00 mA under the pressure of 3.00 Torr.

引用

页码：2530 / 2532

页数：3

共 27 条

[1] In the hollow-cathode effect: conventional and modified geometry [J].