Preparation of SrTiO3 thin films by the liquid phase deposition method

被引：30
|
作者：
Gao, YF [1 ]
Masuda, Y [1 ]
Yonezawa, T [1 ]
Koumoto, K [1 ]
机构：
[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Nagoya, Aichi 4648603, Japan
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2003年 / 99卷 / 1-3期
关键词：
strontium titanate; thin film; liquid phase deposition;
D O I：
10.1016/S0921-5107(02)00527-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Successful preparation of strontium titanate (SrTiO3; STO) thin films has been realized by the liquid phase deposition method. The STO precursor solid thin films with close-packed grains smaller than 200 nm were fabricated from an aqueous solution of Sr(NO3)(2)/(NH4)(TiF6)-Ti-2/H3BO3 = 1/1/3 (molar ratio) at 50 degreesC on a Si substrate. X-ray photoelectron spectroscopy analysis showed that the as-deposited film contained fluorine as an impurity, which could be completely eliminated by annealing at 500 degreesC in air, accompanying the crystallization of the as-deposited amorphous thin film into perovskite-type STO. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：290 / 293
页数：4
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