The influence of nanoscale morphology on the resistivity of cluster-assembled nanostructured metallic thin films

被引:30
作者
Barborini, E. [1 ]
Corbelli, G. [2 ,3 ]
Bertolini, G. [1 ]
Repetto, P. [1 ]
Leccardi, M. [1 ]
Vinati, S.
Milani, P. [2 ,3 ]
机构
[1] Tethis srl, I-20143 Milan, Italy
[2] Univ Milan, CIMAINA, I-20133 Milan, Italy
[3] Univ Milan, Dipartimento Fis, I-20133 Milan, Italy
关键词
SURFACE-ROUGHNESS; ELECTRICAL-RESISTIVITY; CONDUCTION; PERCOLATION; BEAMS; MODEL;
D O I
10.1088/1367-2630/12/7/073001
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We have studied in situ the evolution of the electrical resistivity of Fe, Pd, Nb, Wand Mo cluster-assembled films during their growth by supersonic cluster beam deposition. We observed resistivity of cluster-assembled films several orders of magnitude larger than the bulk, as well as an increase in resistivity by increasing the film thickness in contrast to what was observed for atom-assembled metallic films. This suggests that the nanoscale morphological features typical of ballistic films growth, such as the minimal cluster-cluster interconnection and the evolution of surface roughness with thickness, are responsible for the observed behaviour.
引用
收藏
页数:12
相关论文
共 36 条
[1]  
[Anonymous], 1995, FRACTAL CONCEPT SURF, DOI DOI 10.1017/CBO9780511599798
[2]   Bad metals made with good-metal components [J].
Arnason, SB ;
Herschfield, SP ;
Hebard, AF .
PHYSICAL REVIEW LETTERS, 1998, 81 (18) :3936-3939
[3]   A pulsed microplasma source of high intensity supersonic carbon cluster beams [J].
Barborini, E ;
Piseri, P ;
Milani, P .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (21) :L105-L109
[4]   Batch fabrication of metal oxide sensors on micro-hotplates [J].
Barborini, E. ;
Vinati, S. ;
Leccardi, M. ;
Repetto, P. ;
Bertolini, G. ;
Rorato, O. ;
Lorenzelli, L. ;
Decarli, M. ;
Guarnieri, V. ;
Ducati, C. ;
Milani, P. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (05)
[5]   Morphology and electrical resistivity of metallic nanostructures [J].
Camacho, JM ;
Oliva, AI .
MICROELECTRONICS JOURNAL, 2005, 36 (3-6) :555-558
[6]   Hydrogen-induced percolation in discontinuous films [J].
Dankert, O ;
Pundt, A .
APPLIED PHYSICS LETTERS, 2002, 81 (09) :1618-1620
[7]   Size effects in the electrical resistivity of polycrystalline nanowires [J].
Durkan, C ;
Welland, ME .
PHYSICAL REVIEW B, 2000, 61 (20) :14215-14218
[8]   MACROSCOPIC SURFACE-ROUGHNESS AND THE RESISTIVITY OF THIN METAL-FILMS [J].
ELSOM, KC ;
SAMBLES, JR .
JOURNAL OF PHYSICS F-METAL PHYSICS, 1981, 11 (03) :647-656
[9]   Hydrogen sensors and switches from electrodeposited palladium mesowire arrays [J].
Favier, F ;
Walter, EC ;
Zach, MP ;
Benter, T ;
Penner, RM .
SCIENCE, 2001, 293 (5538) :2227-2231
[10]   INFLUENCE OF SURFACE-ROUGHNESS ON THE CONDUCTIVITY OF METALLIC AND SEMICONDUCTING QUASI-2-DIMENSIONAL STRUCTURES [J].
FISHMAN, G ;
CALECKI, D .
PHYSICAL REVIEW B, 1991, 43 (14) :11581-11585