Optical properties of pulsed-laser deposited BaTiO3 thin films

被引：0
|
作者：
Xu, J [1 ]
Durisin, DP [1 ]
Auner, GW [1 ]
机构：
[1] Wayne State Univ, Dept Elect & Comp Engn, Detroit, MI 48202 USA
来源：
Photon Processing in Microelectronics and Photonics IV | 2005年 / 5713卷
关键词：
pulsed laser deposition (PLD); barium titanate; optical properties; ferroelectric films;
D O I：
10.1117/12.584639
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin films of barium titanate (BaTiO3) have been grown on Si (100) and UV fused silica substrates using KrF pulsed - laser deposition (PLD). The films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and UV/VIS/NIR spectroscopy. Smooth and stoichiometric films were grown on Si (100) substrate at O-2 pressure range of 10-30 mTorr and substrate temperature of 600 degrees C-620 degrees C. The XRD patterns of the films revealed the polycrystalline peaks with a preferential orientation. The optical properties of BaTiO3 films were investigated in terms of UV-VIS transmission spectrum of the films deposited on UV fused silica substrate. The spectral dependences of refractive index and absorption coefficient, and the thickness of the films have been calculated from optical transmission measurements using the envelope method. The band gap energy (Eg) of BaTiO3 films was found to be 3.35eV.
引用
收藏
页码：305 / 310
页数：6
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