Vibration control of a turbomolecular vacuum pump using piezoelectric actuators

被引：7
|
作者：
Piroddi, Luigi [1 ]
Leva, Alberto [1 ]
Casaro, Fausto [2 ]
机构：
[1] Politecn Milan, Dipartimento Elettron & Informaz, Via Ponzio 34-5, I-20133 Milan, Italy
[2] Varian Vaccum Technol, I-10040 Turin, Italy
来源：
PROCEEDINGS OF THE 45TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-14 | 2006年
关键词：
D O I：
10.1109/CDC.2006.377707
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This manuscript presents an experimental activity concerning the active vibration control of a turbomolecular vacuum pump. Based on extensive tests, performed with the ad hoc laboratory setup described in this work, some possible alternatives are devised for the design of a digital active control system. Both simulations and (preliminary) experimental results are reported.
引用
收藏
页码：6555 / +
页数：2
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