Queueing theory for semiconductor manufacturing systems: A survey and open problems

被引：96

作者：

Shanthikumar, J. George ^{[1
]}

Ding, Shengwei

Zhang, Mike Tao

机构：

[1] Univ Calif Berkeley, Dept Ind Engn & Operat Res, Berkeley, CA 94720 USA

[2] Intel Corp, Chandler, AZ 85248 USA

来源：

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING | 2007年 / 4卷 / 04期

关键词：

cycle time; manufacturing systems; queueing theory; semiconductor manufacturing; EFFECTIVE PROCESS TIMES; WAFER FABRICATION; NETWORK MODEL; SCHEDULING POLICIES; FLUID NETWORK; DECOMPOSITION; VARIABILITY; APPROXIMATIONS; THROUGHPUT; BOUNDS;

D O I：

10.1109/TASE.2007.906348

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper surveys applications of queueing theory for semiconductor manufacturing systems (SMSs). Due to sophisticated tool specifications and process flows in semiconductor manufacturing, 'queueing models can be very complicated. Research efforts have been on the improvement of model assumptions and model input, mainly in the first moment (averages) and the second moment (variations). However, practices show that implementation of classical queueing theory in semiconductor industry has been unsatisfactory. In this paper, open problems on queueing modeling of SMS are discussed. A potential solution is also proposed by relaxing the independent assumptions in the classical queueing theory.

引用

页码：513 / 522

页数：10

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