Investigation of chemical mechanical polishing of zinc oxide thin films

被引：17
作者：
Gupta, Sushant [1 ]
Kumar, Purushottam [2 ]
Chakkaravathi, A. Arul [2 ]
Craciun, Doina [3 ]
Singh, Rajiv K. [1 ]
机构：
[1] Univ Florida, Dept Mat Sci, Gainesville, FL 32611 USA
[2] Sinmat Inc, Gainesville, FL 32641 USA
[3] Natl Inst Laser Plasma & Radiat Phys, Bucharest, Romania
来源：
APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 13期
关键词：
Transparent conducting oxide; Zinc oxide; Chemical mechanical polishing; Thin films; OPTICAL-PROPERTIES; SPRAY-PYROLYSIS; SOLAR-CELLS; ZNO FILMS; SAPPHIRE; GAN; LAYERS; MICROSTRUCTURE; PERFORMANCES; DEPOSITION;
D O I：
10.1016/j.apsusc.2011.01.116
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Zinc oxide has become an important material for various applications. Commercially available zinc oxide single crystals and as-grown zinc oxide thin films have high surface roughness which has detrimental effects on the growth of subsequent layers and device performance. A chemical mechanical polishing (CMP) process was developed for the polishing of zinc oxide polycrystalline thin films. Highly smooth surfaces with RMS roughness < 6 angstrom (as compared to the initial roughness of 26 +/- 6 angstrom) were obtained under optimized conditions with removal rates as high as 670 angstrom/min. Effects of various CMP parameters on removal rate and surface roughness were evaluated. The role of pH on the polishing characteristics was investigated in detail. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：5837 / 5843
页数：7
相关论文
共 43 条
  • [1] A tribochemical study of ceria-silica interactions for CMP
    Abiade, Jeremiah T.
    Yeruva, Suresh
    Choi, Wonseop
    Moudgil, Brij M.
    Kumar, Dhananjay
    Singha, Rajiv K.
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (11) : G1001 - G1004
  • [2] Optically pumped lasing of ZnO at room temperature
    Bagnall, DM
    Chen, YF
    Zhu, Z
    Yao, T
    Koyama, S
    Shen, MY
    Goto, T
    [J]. APPLIED PHYSICS LETTERS, 1997, 70 (17) : 2230 - 2232
  • [3] Influence of substrate on the microstructure of microcrystalline silicon layers and cells
    Bailat, J
    Vallat-Sauvain, E
    Feitknecht, L
    Droz, C
    Shah, A
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2002, 299 : 1219 - 1223
  • [4] Smoothing of ZnO films by gas cluster ion beam
    Chen, H
    Liu, SW
    Wang, XM
    Iliev, MN
    Chen, CL
    Yu, XK
    Liu, JR
    Ma, K
    Chu, WK
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 241 (1-4) : 630 - 635
  • [5] Oxygen pressure-tuned epitaxy and optoelectronic properties of laser-deposited ZnO films on sapphire
    Choopun, S
    Vispute, RD
    Noch, W
    Balsamo, A
    Sharma, RP
    Venkatesan, T
    Iliadis, A
    Look, DC
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (25) : 3947 - 3949
  • [6] CHEMICAL PROCESSES IN GLASS POLISHING
    COOK, LM
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 120 (1-3) : 152 - 171
  • [7] Synthesis and optical properties of tetrapod-like zinc oxide nanorods
    Dai, Y
    Zhang, Y
    Li, QK
    Nan, CW
    [J]. CHEMICAL PHYSICS LETTERS, 2002, 358 (1-2) : 83 - 86
  • [8] Effect of pH and impurities on the surface charge of zinc oxide in aqueous solution
    Degen, A
    Kosec, M
    [J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2000, 20 (06) : 667 - 673
  • [9] Flow rate and interface roughness of zinc oxide thin films deposited by spray pyrolysis technique
    Ebothé, J
    El Hichou, A
    Vautrot, P
    Addou, M
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 93 (01) : 632 - 640
  • [10] Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells
    Fay, S.
    Feitknecht, L.
    Schluchter, R.
    Kroll, U.
    Vallat-Sauvain, E.
    Shah, A.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2006, 90 (18-19) : 2960 - 2967
12345