Structural and optical properties of InAs quantum dot chains grown on nanoimprint lithography structured GaAs with different pattern orientations

被引:23
作者
Hakkarainen, T. V. [1 ]
Tommila, J. [1 ]
Schramm, A. [1 ]
Tukiainen, A. [1 ]
Ahorinta, R. [1 ]
Dumitrescu, M. [1 ]
Guina, M. [1 ]
机构
[1] Tampere Univ Technol, Optoelect Res Ctr, FIN-33101 Tampere, Finland
关键词
OVERGROWTH; POLARIZATION; EVOLUTION;
D O I
10.1063/1.3506903
中图分类号
O59 [应用物理学];
学科分类号
摘要
We use large-scale UV nanoimprint lithography prepatterned GaAs substrates for site-controlled growth of InAs quantum dot chains by molecular beam epitaxy. We demonstrate simultaneous fabrication of quantum dot chains with high optical quality along four different crystal orientations, [011], [01 (1) over bar], [010], and [001]. We show that the [01 (1) over bar], [010], and [001]-oriented quantum dot chains not only have similar morphology but also experience similar in-plane optical anisotropy, which tends to align along the axis of the quantum dot chain. Our optical and structural results show that InAs quantum dot chains could be a potential platform for nanophotonic waveguiding and integrated circuits. (C) 2010 American Institute of Physics. [doi:10.1063/1.3506903]
引用
收藏
页数:3
相关论文
共 21 条
[1]   High optical quality InAs site-controlled quantum dots grown on soft photocurable nanoimprint lithography patterned GaAs substrates [J].
Cheng, Chien-Chia ;
Meneou, K. ;
Cheng, K. Y. .
APPLIED PHYSICS LETTERS, 2009, 95 (17)
[2]   Nanoimprint lithography [J].
Chou, SY ;
Krauss, PR ;
Renstrom, PJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06) :4129-4133
[3]   Universal shapes of self-organized semiconductor quantum dots:: Striking similarities between InAs/GaAs(001) and Ge/Si(001) [J].
Costantini, G ;
Rastelli, A ;
Manzano, C ;
Songmuang, R ;
Schmidt, OG ;
Kern, K ;
von Känel, H .
APPLIED PHYSICS LETTERS, 2004, 85 (23) :5673-5675
[4]  
Grundmann M., 2002, NANOOPTOELECTRONICS
[5]   Lateral Ordering of InAs Quantum Dots on Cross-hatch Patterned GaInP [J].
Hakkarainen, Teemu ;
Schramm, Andreas ;
Tukiainen, Antti ;
Ahorinta, Risto ;
Toikkanen, Lauri ;
Guina, Mircea .
NANOSCALE RESEARCH LETTERS, 2010, 5 (12) :1892-1896
[6]   Large scale nanolithography using nanoimprint lithography [J].
Heidari, B ;
Maximov, I ;
Sarwe, EL ;
Montelius, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06) :2961-2964
[7]   Structural and optical investigations of 1-, 2-, and 3-dimensional InAs quantum dot arrays [J].
Heidemeyer, H ;
Müller, C ;
Schmidt, OG .
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2004, 23 (3-4) :237-242
[8]   WSXM:: A software for scanning probe microscopy and a tool for nanotechnology [J].
Horcas, I. ;
Fernandez, R. ;
Gomez-Rodriguez, J. M. ;
Colchero, J. ;
Gomez-Herrero, J. ;
Baro, A. M. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (01)
[9]   Polymer imprint lithography with molecular-scale resolution [J].
Hua, F ;
Sun, YG ;
Gaur, A ;
Meitl, MA ;
Bilhaut, L ;
Rotkina, L ;
Wang, JF ;
Geil, P ;
Shim, M ;
Rogers, JA ;
Shim, A .
NANO LETTERS, 2004, 4 (12) :2467-2471
[10]   Surface morphology evolution during the overgrowth of large InAs-GaAs quantum dots [J].
Joyce, PB ;
Krzyzewski, TJ ;
Bell, GR ;
Jones, TS .
APPLIED PHYSICS LETTERS, 2001, 79 (22) :3615-3617