Polarization Coulomb field scattering in AlGaN/AlN/GaN heterostructure field-effect transistors

被引:77
作者
Lv, Yuanjie [1 ]
Lin, Zhaojun [1 ]
Zhang, Yu [1 ]
Meng, Lingguo [1 ]
Luan, Chongbiao [1 ]
Cao, Zhifang [1 ]
Chen, Hong [2 ]
Wang, Zhanguo [3 ]
机构
[1] Shandong Univ, Sch Phys, Jinan 250100, Peoples R China
[2] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100080, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
2-DIMENSIONAL ELECTRON-GAS; INTERFACIAL LAYER; MOBILITY;
D O I
10.1063/1.3569138
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using the measured capacitance-voltage curves of Ni Schottky contacts with different contact areas and the current-voltage characteristics for the circular and rectangular AlGaN/AlN/GaN heterostructure field-effect transistors (HFETs) at low drain-source voltage, we found that the polarization Coulomb field scattering has an important influence on the two-dimensional electron gas (2DEG) electron mobility in both the circular and rectangular AlGaN/AlN/GaN HFETs. Moreover, the polarization Coulomb field scattering in AlGaN/AlN/GaN heterostructures is relatively weaker compared to that in AlGaN/GaN heterostructures, which is attributed to the AlN interlayer in AlGaN/AlN/GaN heterostructures to enlarge the average distance between the 2DEG electrons and the polarization charges. (C) 2011 American Institute of Physics. [doi:10.1063/1.3569138]
引用
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页数:3
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