A new optical silicon MEMS pressure sensor with computer-aided detection

被引：0

作者：

Sarelo, Katarzyna ^{[1
]}

Gorecka-Drzazga, A. ^{[1
]}

Dziuban, Jan ^{[1
]}

Lizanets, Danylo ^{[2
]}

机构：

[1] Wroclaw Univ Technol, Elect Microsyst & Photon Dept, Janiszewskiego St 11-17, Wroclaw, Poland

[2] Lviv Polytech Natl Univ, Dept Comp Aided Design Syst, Lvov, Ukraine

来源：

PROCEEDINGS OF XIIITH INTERNATIONAL CONFERENCE - EXPERIENCE OF DESIGNING AND APPLICATION OF CAD SYSTEMS IN MICROELECTRONICS CADSM 2015 | 2015年

关键词：

pressure sensor; optical detection; MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new optical MEMS silicon pressure sensor for use in high temperature (up to 450 degrees C) and high radiation environments has been developed. Preliminary tests of the pressure sensor integrated with the components of the optical detection system and software has showed accurate detection of pressure by purely optical system.

引用

页码：90 / 92

页数：3