A multifunctional contactless profilometer based on a tunable acousto-optical image filter

被引：2
作者：
Viskovatykh, A. V. [1 ]
Machikhin, A. S. [1 ]
Pozhar, V. E. [1 ]
Pustovoit, V. I. [1 ]
机构：
[1] Russian Acad Sci, Sci Technol Ctr Unique Instrument Making, Moscow 117342, Russia
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2015年 / 58卷 / 01期
基金：
俄罗斯基础研究基金会;
关键词：
OPTICAL-COHERENCE; MICROSCOPY;
D O I：
10.1134/S0020441215010133
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A contactless complete-field profilometer operating as an optical coherent microscope with the spectral recording is designed. Its special feature is that the spectral selection is carried out in the receiving channel. An acousto-optical image monochromator is used for this purpose. The experimental relief surface data are given.
引用
收藏
页码：114 / 117
页数：4
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