Fabrication of light emitting diodes transferred onto different substrates by GaN substrate separation technique

被引:1
作者
Kunoh, Y. [1 ]
Takeuchi, K. [1 ]
Inoshita, K. [1 ]
Ohbo, H. [1 ]
Tokunaga, S. [1 ]
Goto, T. [1 ]
Kunisato, T. [1 ]
机构
[1] Sanyo Elect Co Ltd, Adv Devices Res Ctr, Hirakata, Osaka 5738534, Japan
来源
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 7-8 | 2010年 / 7卷 / 7-8期
关键词
GaN; MOVPE; laser application; LEDs; LASER LIFT-OFF; PHASE-SEPARATION; WELLS; FILMS;
D O I
10.1002/pssc.200983576
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We have successfully transferred GaN films grown on high crystalline quality GaN substrates onto different substrates, where we have developed a laser lift-off technique with a green laser and an absorption-enhanced InGaN layer as a sacrificial layer (a layer to absorb laser beams). We have also achieved an output power of 13.0 mW at 20 mA with a wavelength of approximately 410 nm and an external quantum efficiency of 21.6 % for light emitting diodes transferred on Si substrates by using this method. (c) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页数:3
相关论文
共 16 条
[1]   Study of GaN light-emitting diodes fabricated by laser lift-off technique [J].
Chu, CF ;
Lai, FI ;
Chu, JT ;
Yu, CC ;
Lin, CF ;
Kuo, HC ;
Wang, SC .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (08) :3916-3922
[2]   Effect of growth interrupt and growth rate on MOVPE-grown InGaN/GaN MQW structures [J].
Jacobs, K ;
Van Daele, B ;
Leys, MR ;
Moerman, I ;
Van Tendeloo, G .
JOURNAL OF CRYSTAL GROWTH, 2003, 248 :498-502
[3]   Temperature dependent characteristics of bulk GaN Schottky rectifiers on free-standing GaN substrates [J].
Kang, BS ;
Ren, F ;
Irokawa, Y ;
Baik, KW ;
Pearton, SJ ;
Pan, CC ;
Chen, GT ;
Chyi, JI ;
Ko, HJ ;
Lee, HY .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (02) :710-714
[4]  
Kelly MK, 1997, PHYS STATUS SOLIDI A, V159, pR3, DOI 10.1002/1521-396X(199701)159:1<R3::AID-PSSA99993>3.0.CO
[5]  
2-F
[6]   Efficient GaN slab vertical light-emitting diode covered with a patterned high-index layer [J].
Kim, Sun-Kyung ;
Cho, Hyun Kyong ;
Bae, Duk Kyu ;
Lee, Jeong Soo ;
Park, Hong-Gyu ;
Lee, Yong-Hee .
APPLIED PHYSICS LETTERS, 2008, 92 (24)
[7]   Effects of In composition on ultraviolet emission efficiency in quaternary InAlGaN light-emitting diodes on freestanding GaN substrates and sapphire substrates [J].
Kyono, T ;
Hirayama, H ;
Akita, K ;
Nakamura, T ;
Ishibashi, K .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (11)
[8]   AlGaInN/AlGaInP two-wavelength laser diodes fabricated by wafer-level transferring technique [J].
Miyachi, M ;
Kimura, Y ;
Chikuma, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2004, 43 (2A) :L136-L138
[9]   Watt-class high-output-power 365 nm ultraviolet light-emitting diodes [J].
Morita, D ;
Yamamoto, M ;
Akaishi, K ;
Matoba, K ;
Yasutomo, K ;
Kasai, Y ;
Sano, M ;
Nagahama, S ;
Mukai, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (9A) :5945-5950
[10]   Phase separation in InGaN multiple quantum wells annealed at high nitrogen pressures [J].
Romano, LT ;
McCluskey, MD ;
Van de Walle, CG ;
Northrup, JE ;
Bour, DP ;
Kneissl, M ;
Suski, T ;
Jun, J .
APPLIED PHYSICS LETTERS, 1999, 75 (25) :3950-3952