Effects of rapid thermal annealing on InGaAsN quantum well based devices grown on misoriented (111)B GaAs

被引:0
作者
Miguel-Sánchez, J [1 ]
Guzmán, A [1 ]
Ulloa, JM [1 ]
Hierro, A [1 ]
Muñoz, E [1 ]
机构
[1] Univ Politecn Madrid, Escuela Tecn Super Ingn Telecommun, ISOM, E-28040 Madrid, Spain
来源
PHOTONIC MATERIALS, DEVICES, AND APPLICATIONS, PTS 1 AND 2 | 2005年 / 5840卷
关键词
Rapid Thermal Annealing; p-i-n diodes; laser diodes; photoluminescence; miso ientation; quantum well;
D O I
10.1117/12.608415
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We present in this work the effects of the rapid thermal annealing on the optical properties of InGaAsN single quantum wells grown on two different kind of misoriented GaAs (111)B substrates: 10 toward [-211] and 2 degrees toward [2-1-1]. An increase of more than one order of magnitude of the photoluminescence emission is shown, as well as a shift towards higher energies of peak emission of the quantum well. This blueshift was found to be greater for the samples grown on the 2 degrees misoriented substrates than for the first inisorientation. These samples were grown by molecular beam epitaKy simultaneously, to assure tha same growth conditions for both samples. Different annealing temperatures were used to find the optimum optical properties for the InGaAsN quantum wells on GaAs (111)B. A comparison of the electrical characteristics of p-i-n diodes processed using as grown and annealed samples is presented. Finally, the application of the RTA optimization to InGaAsN laser devices grown on GaAs (111)B is presented.
引用
收藏
页码:766 / 773
页数:8
相关论文
共 20 条
  • [11] Effect of nitrogen on the optical properties of InGaAsN p-i-n structures grown on misoriented (111)B GaAs substrates
    Miguel-Sánchez, J
    Guzmán, A
    Ulloa, JM
    Hierro, A
    Muñoz, E
    [J]. APPLIED PHYSICS LETTERS, 2004, 84 (14) : 2524 - 2526
  • [12] MIGUELSANCHEZ J, 2004, PHYSICA E, V23, P357
  • [13] MIGUELSANCHEZ J, 2005, UNPUB APPL PHYS LETT
  • [14] Effect of rapid thermal annealing on GaInNAs/GaAs quantum wells grown by plasma-assisted molecular-beam epitaxy
    Pan, Z
    Li, LH
    Zhang, W
    Lin, YW
    Wu, RH
    Ge, W
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (09) : 1280 - 1282
  • [15] Piezoelectric InGaAs/GaAs (111)B multiple quantum well photodiodes:: optoelectronic properties by electron beam induced current and cathodoluminescence
    Romero, MJ
    Araújo, D
    Sánchez-Rojas, JL
    Calleja, E
    Muñoz, E
    García, R
    [J]. MICROELECTRONICS JOURNAL, 1999, 30 (4-5) : 413 - 417
  • [16] Optical investigation of the relaxation process in InGaAs/GaAs single strained quantum wells grown on (001) and (111)B GaAs substrates
    Sánchez, JJ
    Tijero, JMG
    Hernando, J
    Sánchez-Rojas, JL
    Izpura, I
    [J]. MICROELECTRONICS JOURNAL, 1999, 30 (4-5) : 363 - 366
  • [18] Nitrogen incorporation in group III-nitride-arsenide materials grown by elemental source molecular beam epitaxy
    Spruytte, SG
    Larson, MC
    Wampler, W
    Coldren, CW
    Petersen, HE
    Harris, JS
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 227 : 506 - 515
  • [19] Mechanisms affecting the photoluminescence spectra of GaInNAs after post-growth annealing
    Tournié, E
    Pinault, MA
    Guzmán, A
    [J]. APPLIED PHYSICS LETTERS, 2002, 80 (22) : 4148 - 4150
  • [20] Gas-source molecular beam epitaxial growth and thermal annealing of GaInNAs/GaAs quantum wells
    Xin, HP
    Kavanagh, KL
    Tu, CW
    [J]. JOURNAL OF CRYSTAL GROWTH, 2000, 208 (1-4) : 145 - 152