High-speed all-optical switching in ion-implanted silicon-on-insulator microring resonators

被引:65
作者
Foerst, Michael [1 ]
Niehusmann, Jan
Ploetzing, Tobias
Bolten, Jens
Wahlbrink, Thorsten
Moormann, Christian
Kurz, Heinrich
机构
[1] Rhein Westfal TH Aachen Klinikum, Inst Halbleitertech, D-52074 Aachen, Germany
[2] AMO GmbH, Adv Microelect Ctr Aachen AMICA, D-52074 Aachen, Germany
关键词
D O I
10.1364/OL.32.002046
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate high-speed all-optical switching via vertical excitation of an electron-hole plasma in an oxygen-ion implanted silicon-on-insulator microring resonator. Based on the plasma dispersion effect the spectral response of the device is rapidly modulated by photoinjection and subsequent: recombination of charge carriers at artificially introduced fast recombination centers. At an implantation dose of 1 x 10(12) cm(-2) the carrier lifetime is reduced to 55 ps, which facilitates optical switching of signal light in the 1.55 mu m wavelength range at modulation speeds larger than 5 Gbits/s. (C) 2007 Optical Society of America.
引用
收藏
页码:2046 / 2048
页数:3
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