NIST data resources for surface analysis by X-ray photoelectron spectroscopy and Auger electron spectroscopy

被引:39
作者
Powell, CJ [1 ]
Jablonski, A
Naumkin, A
Kraut-Vass, A
Conny, JM
Rumble, JR
机构
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
[2] Polish Acad Sci, Inst Phys Chem, PL-01224 Warsaw, Poland
[3] Russian Acad Sci, AN Nesmeyanov Inst Organoelement Cpds, Moscow 117813, Russia
关键词
Auger-electron spectroscopy; databases; electron elastic-scattering cross sections; electron inelastic mean free paths; standard test data; surface analysis; X-ray photoelectron spectroscopy;
D O I
10.1016/S0368-2048(00)00252-8
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A description is given of data resources that are available from the National Institute of Standards and Technology (NIST) for X-ray photoelectron spectroscopy (XPS) and Anger-electron spectroscopy. NIST currently has three databases available: an XPS Database, an Electron Elastic-Scattering Cross-Section Database, and an Electron Inelastic-Mean-Free-Path Database. NIST also offers Standard Test Data (STD) for XPS, a set of simulated XPS data designed to evaluate algorithms and procedures for detecting, locating, and measuring the intensities of overlapping peaks in a doublet. The XPS database and the XPS-STD are available over the internet. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1097 / 1102
页数:6
相关论文
共 20 条
[1]  
Conny JM, 1998, SURF INTERFACE ANAL, V26, P939, DOI 10.1002/(SICI)1096-9918(199811)26:12<939::AID-SIA441>3.0.CO
[2]  
2-V
[3]  
Conny JM, 2000, SURF INTERFACE ANAL, V29, P444, DOI 10.1002/1096-9918(200007)29:7<444::AID-SIA888>3.0.CO
[4]  
2-M
[5]   Determination of the inelastic mean free path (IMFP) of electrons in germanium and silicon by elastic peak electron spectroscopy (EPES) using an analyser of high resolution [J].
Gergely, G ;
Konkol, A ;
Menyhard, M ;
Lesiak, B ;
Jablonski, A ;
Varga, D ;
Toth, J .
VACUUM, 1997, 48 (7-9) :621-624
[6]  
Gries WH, 1996, SURF INTERFACE ANAL, V24, P38, DOI 10.1002/(SICI)1096-9918(199601)24:1<38::AID-SIA84>3.0.CO
[7]  
2-H
[8]   Towards a universal description of elastic scattering effects in X-ray photoelectron spectroscopy [J].
Jablonski, A ;
Tilinin, IS .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1995, 74 (03) :207-229
[9]  
Jablonski A, 1998, SURF INTERFACE ANAL, V26, P374, DOI 10.1002/(SICI)1096-9918(19980501)26:5<374::AID-SIA382>3.0.CO
[10]  
2-U