Vertical-Cavity Surface-Emitting Lasers for Optical Sensing in Microfluidic Microsystems

被引：0

作者：

Kasten, Ansas M. ^{[1
]}

Tice, Joshua D. ^{[2
]}

Giannopoulos, Antonios V. ^{[1
]}

Verma, Varun B. ^{[1
]}

Kenis, Paul J. A. ^{[2
]}

Choquette, Kent D. ^{[1
]}

机构：

[1] Univ Illinois, Dept Elect & Comp Engn, Micro & Nanotechnol Lab, 208 N Wright St, Urbana, IL 61801 USA

[2] Univ Illinois, Dept Chem & Biomol Engn, Roger Adams Lab, Urbana, IL 61801 USA

来源：

VERTICAL-CAVITY SURFACE-EMITTING LASERS XIII | 2009年 / 7229卷

基金：

美国国家科学基金会;

关键词：

VCSEL; microfluidic; opto-fluidic integration; biomedical sensing; PHOTODETECTORS; INTEGRATION;

D O I：

10.1117/12.813407

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 mu M of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

引用

页数：7

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