Correction method for the error of diamond tool's radius in Ultra-precision cutting

被引：0

作者：

Wang Yi ^{[1
]}

Yu Jing-chi ^{[1
]}

机构：

[1] Soochow Univ, Inst Modern Opt Technol, Suzhou 215006, Peoples R China

来源：

5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2010年 / 7655卷

关键词：

Diamond turning tool; radius error; Zernike polynomial coefficients;

D O I：

10.1117/12.866751

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The compensation method for the error of diamond tool's cutting edge is a bottle-neck technology to hinder the high accuracy aspheric surface's directly formation after single diamond turning. Traditional compensation was done according to the measurement result from profile meter, which took long measurement time and caused low processing efficiency. A new compensation method was firstly put forward in the article, in which the correction of the error of diamond tool's cutting edge was done according to measurement result from digital interferometer. First, detailed theoretical calculation related with compensation method was deduced. Then, the effect after compensation was simulated by computer. Finally, phi 50 mm work piece finished its diamond turning and new correction turning under Nanotech 250. Testing surface achieved high shape accuracy pv 0.137 lambda and rms=0.011 lambda, which approved the new compensation method agreed with predictive analysis, high accuracy and fast speed of error convergence.

引用

页数：8