High-performance silicon-graphene hybrid plasmonic waveguide photodetectors beyond 1.55 μm

被引:213
作者
Guo, Jingshu [1 ,2 ]
Li, Jiang [1 ]
Liu, Chaoyue [1 ]
Yin, Yanlong [1 ]
Wang, Wenhui [3 ,4 ,5 ]
Ni, Zhenhua [3 ,4 ,5 ]
Fu, Zhilei [6 ]
Yu, Hui [6 ]
Xu, Yang [2 ,6 ]
Shi, Yaocheng [1 ,2 ]
Ma, Yungui [1 ]
Gao, Shiming [1 ,2 ]
Tong, Limin [1 ]
Dai, Daoxin [1 ,2 ]
机构
[1] Zhejiang Univ, Coll Opt Sci & Engn, Int Res Ctr Adv Photon, Zhejiang Prov Key Lab Sensing Technol,State Key L, Zijingang Campus, Hangzhou 310058, Peoples R China
[2] Zhejiang Univ, Ningbo Res Inst, Ningbo 315100, Peoples R China
[3] Zhejiang Univ, Ningbo Res Inst, Ningbo 315100, Peoples R China
[4] Southeast Univ, Dept Phys, Nanjing 211189, Peoples R China
[5] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 211189, Peoples R China
[6] Zhejiang Univ, Coll Informat Sci & Elect Engn, Hangzhou 310027, Zhejiang, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
HIGH-RESPONSIVITY; MIDINFRARED PHOTORESPONSE; GENERATION; PHOTONICS;
D O I
10.1038/s41377-020-0263-6
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Graphene has attracted much attention for the realization of high-speed photodetection for silicon photonics over a wide wavelength range. However, the reported fast graphene photodetectors mainly operate in the 1.55 mu m wavelength band. In this work, we propose and realize high-performance waveguide photodetectors based on bolometric/photoconductive effects by introducing an ultrathin wide silicon-graphene hybrid plasmonic waveguide, which enables efficient light absorption in graphene at 1.55 mu m and beyond. When operating at 2 mu m, the present photodetector has a responsivity of 70 mA/W and a setup-limited 3 dB bandwidth of >20 GHz. When operating at 1.55 mu m, the present photodetector also works very well with a broad 3 dB bandwidth of >40 GHz (setup-limited) and a high responsivity of 0.4 A/W even with a low bias voltage of -0.3 V. This work paves the way for achieving high-responsivity and high-speed silicon-graphene waveguide photodetection in the near/mid-infrared ranges, which has applications in optical communications, nonlinear photonics, and on-chip sensing.
引用
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页数:11
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