Ball surface acoustic wave hydrogen sensor with widest sensing range and fast response

被引：0
|
作者：
Yamanaka, K. [1 ,5 ]
Abe, T. [1 ]
Iwata, N. [1 ,5 ]
Tsuji, T. [1 ,5 ]
Mihara, T. [1 ,5 ]
Akao, S. [2 ]
Noguchi, K. [2 ]
Nakaso, N. [2 ]
Sim, D. [3 ]
Takeda, N. [3 ]
Ebi, Y. [4 ]
Fukiura, T. [4 ]
Tanaka, H. [4 ]
机构：
[1] Tohoku Univ, Dept Mat Proc, Sendai, Miyagi 980, Japan
[2] Toppan Printing Co, Saitama, Japan
[3] Ball Semicond Inc, Allen, TX 75013 USA
[4] Yamatake Co, Fujisawa, Kanagawa, Japan
[5] CREST, JST, Kawaguchi, Saitama, Japan
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
ball SAW sensor; DQD; hydrogen gas sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
SAW(surface acoustic wave) excited on a spherical surface under a specific condition is naturally collimated, realizing ultra-multiple roundtrips along an equator of the sphere. The ball SAW hydrogen gas sensor is based on this newly discovered phenomenon, and uses a very thin Pd-Ni alloy sensitive film. The detection range for hydrogen gas was 10 ppm to 100 % and the response time was less than Is for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector (DQD).
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页数：2
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