Ball surface acoustic wave hydrogen sensor with widest sensing range and fast response

被引：0

作者：

Yamanaka, K. ^{[1
,5
]}

Abe, T. ^{[1
]}

Iwata, N. ^{[1
,5
]}

Tsuji, T. ^{[1
,5
]}

Mihara, T. ^{[1
,5
]}

Akao, S. ^{[2
]}

Noguchi, K. ^{[2
]}

Nakaso, N. ^{[2
]}

Sim, D. ^{[3
]}

Takeda, N. ^{[3
]}

Ebi, Y. ^{[4
]}

Fukiura, T. ^{[4
]}

Tanaka, H. ^{[4
]}

机构：

[1] Tohoku Univ, Dept Mat Proc, Sendai, Miyagi 980, Japan

[2] Toppan Printing Co, Saitama, Japan

[3] Ball Semicond Inc, Allen, TX 75013 USA

[4] Yamatake Co, Fujisawa, Kanagawa, Japan

[5] CREST, JST, Kawaguchi, Saitama, Japan

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

ball SAW sensor; DQD; hydrogen gas sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SAW(surface acoustic wave) excited on a spherical surface under a specific condition is naturally collimated, realizing ultra-multiple roundtrips along an equator of the sphere. The ball SAW hydrogen gas sensor is based on this newly discovered phenomenon, and uses a very thin Pd-Ni alloy sensitive film. The detection range for hydrogen gas was 10 ppm to 100 % and the response time was less than Is for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector (DQD).

引用

页数：2

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