Structure, optical, and magnetic properties of Mn-doped ZnO films prepared by sputtering

被引:0
作者
Wang, Li-wei [1 ]
Xu, Zheng [1 ]
Zhang, Fu-jun [1 ]
Zhao, Su-ling [1 ]
Lu, Li-fang [1 ]
机构
[1] Beijing Jiaotong Univ, Minist Educ China, Key Lab Luminescence & Opt Informat, Inst Optoelect Technol, Beijing 100044, Peoples R China
基金
中国国家自然科学基金;
关键词
ZnO; magnetron sputtering; ferromagnetism; optical properties; photoluminescence; FERROMAGNETISM; TEMPERATURE;
D O I
10.1007/s12613-010-0344-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The microstructural, optical, and magnetic properties and room-temperature photoluminescence (PL) of Mn-doped ZnO thin films were studied. The chemical compositions were examined by energy dispersive X-ray spectroscopy (EDS) and the charge state of Mn ions in the ZnO:Mn films was characterized by X-ray photoelectronic spectrometry (XPS). From the X-ray diffraction (XRD) data of the samples, it can be found that Mn doping does not change the orientation of ZnO thin films. All the films prepared have a wurtzite structure and grow mainly along the c-axis orientation. The grain size and the residual stress were calculated from the XRD results. The optical transmittance of the film decreases with the increase of manganese content in ZnO. The room-temperature photoluminescence of the films shows that the intensity of near band energy (NBE) emission depends strongly on the Mn content. The hysteresis behavior indicates that the films with the Mn content below 9at% are ferromagnetic at room temperature.
引用
收藏
页码:475 / 480
页数:6
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