Membrane folding by helium ion implantation for three-dimensional device fabrication

被引：39

作者：

Arora, William J.

Sijbrandij, Sybren ^{[1
]}

Stern, Lewis ^{[1
]}

Notte, John ^{[1
]}

Smith, Henry I.

Barbastathis, George

机构：

[1] Carl Zeiss SMT, Peabody, MA 01960 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2007年 / 25卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1116/1.2779049

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors demonstrate that silicon nitride membranes can be folded out of plane into three-dimensional structures by helium ion implantation. The folds have a radius of 1 mu m and can be directed both up or down by varying implant energy. (c) 2007 American Vacuum Society.

引用

收藏

页码：2184 / 2187

页数：4

相关论文

共 10 条

[1]

[Anonymous], 2006, STOPPING RANGE IONS

[2] Membrane folding by ion implantation induced stress to fabricate three-dimensional nanostructures [J].

Arora, William J. ;

Smith, Henry I. ;

Barbastathis, George .

MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) :1454-1458

[3] Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges [J].

Arora, WJ ;

Nichol, AJ ;

Smith, HI ;

Barbastathis, G .

APPLIED PHYSICS LETTERS, 2006, 88 (05) :1-3

[4] STRESS IN ION-IMPLANTED CVD SI3N4 FILMS [J].

EERNISSE, EP .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3337-3341

[5] Overpressurized bubbles versus voids formed in helium implanted and annealed silicon [J].

Fichtner, PFP ;

Kaschny, JR ;

Yankov, RA ;

Mucklich, A ;

Kreissig, U ;

Skorupa, W .

APPLIED PHYSICS LETTERS, 1997, 70 (06) :732-734

[6] Origami fabrication of nanostructured, three-dimensional devices: Electrochemical capacitors with carbon electrodes [J].

In, HJ ;

Kumar, S ;

Shao-Horn, Y ;

Barbastathis, G .

APPLIED PHYSICS LETTERS, 2006, 88 (08)

[7] Two-step magnetic self-alignment of folded membranes for 3D nanomanufacturing [J].

Nichol, Anthony J. ;

Stellman, Paul S. ;

Arora, William J. ;

Barbastathis, George .

MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) :1168-1171

[8] Thin membrane self-alignment using nanomagnets for three-dimensional nanomanufacturing [J].

Nichol, Anthony J. ;

Arora, William J. ;

Barbastathis, George .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (06) :3128-3132

[9]

PATEL AA, 2007, UNPUB

[10] He-vacancy interactions in Si and their influence on bubble formation and evolution [J].

Raineri, V ;

Coffa, S ;

Szilágyi, E ;

Gyulai, J ;

Rimini, E .

PHYSICAL REVIEW B, 2000, 61 (02) :937-945