Influence of the hydrogen evolution on the structural and electronic properties of a-C:H films

被引：16
|
作者：
Bounouh, Y
Spousta, J
Clin, M
Benlahsen, M
Zeinert, A
Portemer, F
Laurent, A
Perriere, J
Zellama, K
Theye, ML
机构：
[1] FAC SCI AMIENS,LAB PHYS COUCHES MINCES,F-80039 AMIENS,FRANCE
[2] FAC SCI AMIENS,URA CNRS 1211,LAB REACTIVITE & CHIM SOLIDES,F-80039 AMIENS,FRANCE
[3] UNIV PARIS 07,PHYS SOLIDES GRP,URA CNRS 17,F-75251 PARIS 05,FRANCE
来源：
DIAMOND AND RELATED MATERIALS | 1996年 / 5卷 / 3-5期
关键词：
amorphous carbon; hydrogen; microstructure; annealing;
D O I：
10.1016/0925-9635(95)00502-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The nature of hydrogen bonding and its influence on the electronic properties and the atomic structure was investigated in two types of a-C:H films prepared in a d.c. multipolar plasma system from pure methane at different substrate bias, by performing H evolution and annealing experiments. The results indicate clearly that these two types of samples have different morphologies in their as-deposited state, and that they behave differently upon annealing up to high temperature.
引用
收藏
页码：453 / 456
页数：4
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