Design of a SAW-based chemical sensor with its microelectronics front-end interface

被引：5

作者：

Cenni, Fabio ^{[1
]}

Cazalbou, Jeremie ^{[1
]}

Mir, Salvador ^{[1
]}

Rufer, Libor ^{[1
]}

机构：

[1] UJF, Grenoble INP, CNRS, TIMA Lab, Paris, France

来源：

MICROELECTRONICS JOURNAL | 2010年 / 41卷 / 11期

关键词：

SAW sensor; Mason's model; PLL; VCRO;

D O I：

10.1016/j.mejo.2010.06.008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A surface acoustic wave (SAW) device is used in this work as the sensing element for a chemical sensor that will be embedded in a wireless sensor node. The SAW device is intended to detect the concentration of gaseous mercury in the environment. The microelectronics front-end architecture has been designed at transistor level in a 0.35 mu m CMOS technology. The SAW device is embedded in a phase-locked loop (PLL) that converts the change of concentration of gaseous mercury into a shift of the loop frequency. Post-layout simulations of the overall sensor including the digital control and read-out blocks have been carried out considering a model of the SAW device described in the Hardware Description Language Verilog-A. Analog tests on the fabricated circuit have demonstrated the functionality of this microelectronics front-end interface. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：723 / 732

页数：10

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