Planar catalytic combustor film for thermoelectric hydrogen sensor

被引：73

作者：

Shin, W ^{[1
]}

Tajima, K ^{[1
]}

Choi, YS ^{[1
]}

Izu, N ^{[1
]}

Matsubara, I ^{[1
]}

Murayama, N ^{[1
]}

机构：

[1] AIST, Adv Mfg Res Inst, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 108卷 / 1-2期

关键词：

thermoelectric hydrogen sensor; micro-hotplate; SiGe; ceramic catalyst;

D O I：

10.1016/j.snb.2004.12.077

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The thick film ceramic catalyst was deposited by dispenser method onto a micro-hotplate of novel thermoelectric hydrogen sensor (THS). The voltage signal of this micro-THS for hydrogen is proportional to the temperature gradient developed on the sensor device by the catalytic combustion of hydrogen. The promising performance of ceramic thick film catalyst of Pt and alumina of the micro-THS has resulted in the successful demonstration of large voltage signal, room temperature operation, and wide-range hydrogen detection. The voltage signal of micro-THS with the ceramic thick film catalyst for 1% hydrogen was 7 and 9.4 mV, at room temperature and 100 degrees C, respectively. The detection range of the sensor for hydrogen in air was found to be about 25 ppm to 3%, even at room temperature operation. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：455 / 460

页数：6

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