A novel self-generating liquid MOCVD precursor for Co3O4 thin films

被引：102

作者：

Gulino, A

Dapporto, P

Rossi, P

Fragalà, I

机构：

[1] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy

[2] INSTM, UdR Catania, I-95125 Catania, Italy

[3] Univ Florence, Dipartimento Energet, I-50139 Florence, Italy

来源：

CHEMISTRY OF MATERIALS | 2003年 / 15卷 / 20期

关键词：

D O I：

10.1021/cm034305z

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The novel [Co(C5F6HO2)2· 2H2O·CH3(OCH2CH2) 4-OCH3] low-melting adduct has been synthesized and characterized. Very mild heating results in the anhydrous Co(hfac) 2tetraglyme liquid and thermal stable complex that evaporates intact. This adduct has proven to be a well-suited precursor for MOCVD of cobalt oxide films.

引用

页码：3748 / 3752

页数：5

共 93 条

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