Preparation of high-quality three-dimensional microstructures on polymethyl methacrylate surfaces by femtosecond laser micromachining and thermal-induced micro-leveling

被引：11

作者：

Ouyang, Ziqing ^{[1
]}

Long, Jiangyou ^{[1
,2
]}

Wu, Junwei ^{[1
]}

Lin, Jinghao ^{[1
]}

Xie, Xiaozhu ^{[1
,2
]}

Tan, Guibin ^{[2
]}

Yi, Xiaohong ^{[3
]}

机构：

[1] Guangdong Univ Technol, Sch Electromech Engn, Laser Micro Nano Proc Lab, Guangzhou 510006, Peoples R China

[2] Guangdong Univ Technol, State Key Lab Precis Elect Mfg Technol & Equipmen, Guangzhou 510006, Peoples R China

[3] Ji Hua Lab, Foshan 528200, Peoples R China

来源：

OPTICS AND LASER TECHNOLOGY | 2022年 / 145卷

基金：

中国国家自然科学基金;

关键词：

Femtosecond laser; Micromachining; PMMA; 3D microstructures; Self-leveling; FABRICATION; NANOSTRUCTURES; ACCUMULATION; MORPHOLOGY; ABLATION;

D O I：

10.1016/j.optlastec.2021.107499

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

As a maskless method, femtosecond (fs) laser micromachining has been used to fabricate microstructures on polymethyl methacrylate (PMMA) substrates, but the fs laser ablation promotes the formation of pores and redeposited debris, generating high surface roughness ranging from hundreds of nanometers to several micrometers. Herein, high-quality three-dimensional microstructures are prepared on PMMA surfaces by fs micromachining under suitable parameters followed by a short annealing treatment. Thermogravimetric analysis coupled with Fourier transform infrared analysis (TG-FTIR) and Raman spectra results reveal that a modified layer may exist on the laser-machined surfaces, which melts more rapidly during the annealing. Improved surface quality is probably caused by the micro-leveling effect of the modified layer. Laser processing parameters greatly affect the final surface morphology. Under optimal parameters, the surface microstructures prepared by this method have sharp edges and smooth inner walls with an average profile surface roughness of 45 +/- 15 nm.

引用

页数：8