Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns

被引：7

作者：

Kang, Huiman ^{[1
]}

Detcheverry, Francois ^{[1
]}

Stuen, Karl O. ^{[1
]}

Craig, Gordon S. W. ^{[1
]}

de Pablo, Juan J. ^{[1
]}

Gopalan, Padma ^{[1
]}

Nealey, Paul F. ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Chem & Biol Engn, Madison, WI 53706 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2010年 / 28卷 / 06期

基金：

美国国家科学基金会;

关键词：

LITHOGRAPHY; DOMAINS; ARRAYS; FABRICATION; ORIENTATION; DIMENSIONS; ROUGHNESS;

D O I：

10.1116/1.3518910

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The effect of the chemical pattern spot size, the spacing on the size, and the shape of the cylindrical domains in thin films of a ternary block copolymer/homopolymer/homopolymer blend was investigated over a range of homopolymer volume fractions. Cylinder-forming ternary blends were composed of polystyrene-block-poly (methyl methacrylate) (PS-b-PMMA), and the corresponding PS and PMMA homopolymers were directed to assemble on chemical patterns that had density multiplication ratios ranging from 1:1 to 4:1. By increasing the homopolymer fraction in the blends, the dimensions of the domains were expanded. When the size of the spots on the chemical pattern was not matched with the size of the domain of the blend in the bulk, the dimensions of the domains at the free surface of the assembled films differed from those at the interface with the chemical pattern. (c) 2010 American Vacuum Society. [DOI: 10.1116/1.3518910]

引用

页码：C6B24 / C6B29

页数：6

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