Surface Energy Effects on the Self-Assembly of Epitaxial Quantum Dots

被引:2
|
作者
Friedman, Lawrence H. [1 ]
机构
[1] Penn State Univ, University Pk, PA 16802 USA
关键词
quantum dots; self-assembly; epitaxial growth; surface energy; roughening; SOS model; step-edges; films; GeSi; InGaAs; INSTABILITY; ENERGETICS; EVOLUTION; DRIVEN; GAAS; ABSORPTION; STABILITY; ISLANDS; FILMS; SI;
D O I
10.1117/12.809796
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Epitaxial self-assembled quantum dots (SAQDs) result from Stranski-Krastanow growth whereby epitaxial 3D islands form spontaneously on a planar thin film. Common systems are GexSi1-x/Si and InxGa1-xAs/GaAs. SAQDs are typically grown on a (001) surface. The formation and evolution of SAQDs is governed in large part by the interaction of surface energy and elastic strain; however, the surface energy density is quite complicated and not well understood. Many growth processes take place at high temperature where stress and entropy effects can have a profound effect on the surface free energy. There are three competing theories of the nature of the planar (001) surface: I. It is a stable crystal facet. II. It is a stable non-faceted surface. III. It is an unstable crystal antifacet. Each leads to a different theory of the SAQD formation process. The first theory appears most often in modeling literature, but the second two theories take explicit account of the discrete nature of a crystal surface. Existing observational and theoretical evidence in support of and against these theories is reviewed. Then a simple statistical mechanics model is presented that yields a phase-diagram depicting when each of the three theories is valid. Finally, the Solid-on-Solid model of crystal surfaces is used to validate the proposed phase diagram and to calculate the orientation and height dependence of the surface free energy that is expressed as a wetting chemical potential, a wetting modulus and surface tilt moduli.
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页数:14
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