High aspect ratio nanometrology using carbon nanotube probes in atomic force microscopy

被引：14
作者：
Fang, F. Z. [1 ]
Xu, Z. W.
Dong, S.
Zhang, G. X.
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
[2] Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Peoples R China
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2007年 / 56卷 / 01期
关键词：
carbon nanotube; atomic force microscopy; metrology;
D O I：
10.1016/j.cirp.2007.05.127
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Carbon nanotube (CNT) has several unique characteristics that are ideal for applying it as probe for atomic force microscopy (AFM). However, some of these characteristics make it inherently difficult to produce CNT probes. This paper developed a novel welding process that can produce nanotube probe at different lengths. The new process could control CNT probe orientation well and achieve bonding strength of greater than 306 MN/m(2). In an AFM scanning of immunoglobulin G protein and aluminum oxide, nanotube probes show better probe wear resistance, lower sample damage and a higher aspect ratio of 2.3 times than conventional silicon probes.
引用
收藏
页码：533 / 536
页数：4
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