Mechanical behaviors of quenched iron film sputtering deposited on glass substrate

被引：5
|
作者：
Zhang, Yong-Ju [1 ]
Yu, Sen-Jiang
Cai, Ping-Gen
Zhou, Hong
机构：
[1] Taizhou Univ, Dept Phys, Linhai 317000, Peoples R China
[2] China Jiliang Univ, Dept Phys, Hangzhou 310018, Peoples R China
[3] Zhejiang Univ, Dept Phys, Hangzhou 310027, Peoples R China
来源：
SURFACE REVIEW AND LETTERS | 2007年 / 14卷 / 05期
基金：
中国国家自然科学基金;
关键词：
quenched film; compressive stress; buckling pattern; sputtering;
D O I：
10.1142/S0218625X07010366
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A characteristic wedge-shaped iron (Fe). film system, deposited on glass substrate by a DC-magnetron sputtering method and quenched by silicone oil during deposition, has been successfully fabricated. The mechanical behaviors of the quenched and non-quenched Fe films have been compared and analyzed. The internal stress is found to transform from tension to compression in nature after quenching, which results in the formation of buckling pattern in the quenched Fe film while crack pattern in the non-quenched film. It is proposed that the origin of the compressive stress is mainly due to freezing of the Fe atoms (or clusters) with high kinetic energy and doping of the oil molecules into the Fe film defects.
引用
收藏
页码：879 / 884
页数：6
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