Reduction of debris of a CO2 laser-produced Sn plasma extreme ultraviolet source using a magnetic field

被引：38
作者：
Ueno, Yoshifumi [1 ]
Soumagne, Georg [1 ]
Sumitani, Akira [1 ]
Endo, Akira [1 ]
Higashiguchi, Takeshi [2 ,3 ]
Yugami, Noboru [2 ,3 ]
机构：
[1] Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Kanagawa 2548567, Japan
[2] Utsunomiya Univ, Dept Energy & Environm Sci, Grad Sch Engn, Tochigi 3218585, Japan
[3] Utsunomiya Univ, CORE, Tochigi 3218585, Japan
来源：
APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 21期
关键词：
D O I：
10.1063/1.2938365
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We demonstrated a fivefold reduction in Sn debris deposited on small Mo/Si multilayer mirrors from a Sn planar target by applying a static magnetic field of 1 T. The debris reduction is attributed to the decrease of more than three orders in the number of ions that reach the sample mirror due to their interaction with the applied magnetic field that guides the ions away from the mirror. The remaining deposition is due to neutral Sn atoms that do not interact with the applied magnetic field. (C) 2008 American Institute of Physics.
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页数：3
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