Design of an on-chip Fourier transform spectrometer based on waveguide Mach-Zehnder Interferometer and fluidics

被引：5

作者：

Li, Liang ^{[1
]}

Qiao, Qifeng ^{[1
]}

Zhou, Guangcan ^{[1
]}

Qi, Yi ^{[1
]}

Lim, Zi Heng ^{[1
]}

Chau, Fook Siong ^{[1
]}

Zhou, Guangya ^{[1
]}

机构：

[1] Natl Univ Singapore, Fac Engn, Dept Mech Engn, Micro & Nano Syst Initiat, 9 Engn Dr 1, Singapore 117575, Singapore

来源：

OPTICS COMMUNICATIONS | 2020年 / 460卷

关键词：

Fourier transform infrared; Infrared spectrometer; Waveguide; DEPENDENCE;

D O I：

10.1016/j.optcom.2019.125103

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An on-chip Fourier transform spectrometer based on the semiconductor waveguide Mach-Zehnder Interferometer (MZI) is proposed. The MZI is constructed by rectangular silicon-on-insulate waveguides. With the help of digital microfluidics, the sensing arm of MZI can be covered by liquid step-by-step, and as a result, the output of the MZI can be modulated accordingly. The length of the MZI arm is 3 mm for a theoretical demonstration. This spectrometer works well in the wavelength range of 1.5 mu m to 1.7 mu m with the spectral resolution reaching up to 3.1 nm. The performance can be further improved by extending the MZI arms along with the liquid channel.

引用

页数：5

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