Frequency-agile terahertz-wave sources and applications to sensitive diagnosis of semiconductor wafers

被引：0
作者：
Minamide, Hiroaki [1 ]
Ito, Hiromasa [1 ]
机构：
[1] RIKEN ASI, Tera Photon Lab, Sendai, Miyagi 9800845, Japan
来源：
TERAHERTZ PHYSICS, DEVICES, AND SYSTEMS V: ADVANCE APPLICATIONS IN INDUSTRY AND DEFENSE | 2011年 / 8023卷
关键词：
ultra-widely tunable Terahertz-wave source; organic nonlinear optical crystals; nondestructive diagnosis of semiconductor wafers; GENERATION;
D O I：
10.1117/12.887941
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have developed ultra-widely tunable THz-wave source using organic nonlinear optical crystals such as 4-dimethylamino-N-methyl-4-stilbazolium tosylate (DAST) and N-benzyl-2-methyl-4-nitroaniline (BNA). The THz-wave difference frequency generation using these crystals covers the ultra-widely tunable range of 0.1-40 THz with frequency agility. Collaborating with Furukawa Co. Ltd., we used the progressive, frequency-agile THz-wave source for industrial applications and produced a sensitive, non-destructive method for examining carrier-density and electrical properties of semiconductors. This method presents novel possibilities for use in the semiconductor industry.
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页数：6
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