Bulk growth of wide band gap II-VI compound semiconductors by physical vapor transport

被引:9
|
作者
Su, CH
机构
来源
MATERIALS RESEARCH IN LOW GRAVITY | 1997年 / 3123卷
关键词
physical vapor transport (PVT); II-VI compound semiconductors;
D O I
10.1117/12.277715
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The mechanism of physical vapor transport of II-Tn semiconducting compounds was studied both theoretically, using a one-dimensional diffusion model, as well as experimentally. It was found that the vapor phase stoichiometry is critical in determining the vapor transport rate. The experimental heat treatment methods to control the vapor composition over the starting materials were investigated and the effectiveness of the heat treatments was confirmed by partial pressure measurements using an optical absorption technique. The effect of residual (foreign) gas on the transport rate was also studies theoretically by the diffusion model and confirmed experimentally by the measurements of total pressure and compositions of the residual gas. An in-situ dynamic technique for the transport rate measurements and a further extension of the technique that simultaneously measured the partial pressures and transport rates were performed and, for the first time, the experimentally determined mass fluxes were compared with those calculated, without any adjustable parameters, from the diffusion model. Using the information obtained from the experimental transport rate measurements as guideline high quality bulk crystal of wide band gap II-VT semiconductor were grown from the source materials which undergone the same heat treatment methods. The grown crystals were then extensively characterized with emphasis on the analysis of the crystalline structural defects.
引用
收藏
页码:7 / 21
页数:15
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