Compact silicon tunable Fabry-Perot resonator with low power consumption

被引:65
作者
Barrios, CA [1 ]
Almeida, VR [1 ]
Panepucci, RR [1 ]
Schmidt, BS [1 ]
Lipson, M [1 ]
机构
[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
基金
美国国家科学基金会;
关键词
Bragg reflector; Fabry-Perot (F-P) cavity; integrated optics; optical modulator; silicon optoelectronics;
D O I
10.1109/LPT.2003.822251
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a 20-mum-long tunable optical resonator integrated on a silicon-on-insulator waveguide. The microresonator consists of a planar Fabry-Perot microcavity defined by deep Si/SiO2 Bragg reflectors with a high finesse of 11.2. The device is electrically driven and shows a modulation depth as high as 53% for a power consumption of only 20 mW.
引用
收藏
页码:506 / 508
页数:3
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