Bias stress and humidity exposure of amorphous InGaZnO thin-film transistors with atomic layer deposited Al2O3 passivation using dimethylaluminum hydride at 200 °C

Highly reliable amorphous InGaZnO (a-IGZO) (In:Ga:Zn:O = 2:2:1:7) thin-film transistors (TFTs) were fabricated with 25 nm-thick Al2O3 passivation deposited by atomic layer deposition (ALD) using dimethylaluminum hydride (DMAH). Al2O3 passivation deposited at various temperatures was studied to determine its effect on TFT behavior following gate bias stress and humidity exposure. The Al2O3-passivated a-IGZO TFTs demonstrated an on-off current ratio (I-on/I-off) of similar to 10(8) and linear mobility (mu) of 9 to 13 cm(2) V-1 s(-1). An optimum ALD temperature of 200 degrees C was demonstrated to result in Al2O3-passivated a-IGZO TFTs with very small on-voltage shifts of 0.3 V and -2.7 V against positive bias stress and negative bias illumination stress (NBIS) after 10 000 s of stress time. Furthermore, negligible degradation was observed after humidity exposure. The results of x-ray photoelectron spectroscopic analysis of the O 1s spectra showed the highest peak area ratio for metal-oxygen (M-O) bonding and lowest metal-oxygen vacancy (M-V-o) bonding, relating to the least amount of trap sites both in the bulk region of a-IGZO and near the interface of Al2O3/a-IGZO, for the device passivated at 200 degrees C. It was also found that at a low deposition temperature (<= 100 degrees C), low-density Al2O3 was formed with high carbon contamination and hydrogen while at a high deposition temperature (>= 300 degrees C), high hydrogen concentration was also present in high-density Al2O3. The hydrogen incorporation from Al2O3 passivation to a-IGZO channel creates bulk defects and trap sites as well as in the interface of a-IGZO and SiO2 gate insulator. At 200 degrees C, high quality Al2O3 passivation was achieved with high density and reduced impurities leading to improved device reliability. These results can be applied to long term sustained device operations which are reliable against different stresses.