Interdiffused quantum wells for lateral carrier confinement in VCSEL's

被引:20
作者
Naone, RL [1 ]
Floyd, PD
Young, DB
Hegblom, ER
Strand, TA
Coldren, LA
机构
[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
[2] Xerox PARC, Palo Alto, CA 94302 USA
[3] Rockwell Int Sci Ctr, Thousand Oaks, CA 91360 USA
[4] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
关键词
quantum-well intermixing; semiconductor device fabrication; surface emitting lasers;
D O I
10.1109/2944.720483
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We show that it is necessary to eliminate carrier diffusion in the active region for viable vertical-cavity lasers (VCL's) with small dimensions, However, methods that work well in reducing lateral carrier leakage in narrow ridge-waveguide lasers such as silicon induced disordering may be problematic in VCL structures. Encouraging results from novel methods for impurity free intermixing for VCL applications are presented.
引用
收藏
页码:706 / 714
页数:9
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