Interdiffused quantum wells for lateral carrier confinement in VCSEL's

被引:20
作者
Naone, RL [1 ]
Floyd, PD
Young, DB
Hegblom, ER
Strand, TA
Coldren, LA
机构
[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
[2] Xerox PARC, Palo Alto, CA 94302 USA
[3] Rockwell Int Sci Ctr, Thousand Oaks, CA 91360 USA
[4] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
关键词
quantum-well intermixing; semiconductor device fabrication; surface emitting lasers;
D O I
10.1109/2944.720483
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We show that it is necessary to eliminate carrier diffusion in the active region for viable vertical-cavity lasers (VCL's) with small dimensions, However, methods that work well in reducing lateral carrier leakage in narrow ridge-waveguide lasers such as silicon induced disordering may be problematic in VCL structures. Encouraging results from novel methods for impurity free intermixing for VCL applications are presented.
引用
收藏
页码:706 / 714
页数:9
相关论文
共 44 条
[31]   Design and fabrication of VCSEL's with AlxOy-GaAs DBR's [J].
MacDougal, MH ;
Dapkus, PD ;
Bond, AE ;
Lin, CK ;
Geske, J .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1997, 3 (03) :905-915
[32]   Oxidation of AlGaAs layers for tapered apertures in vertical-cavity lasers [J].
Naone, RL ;
Hegblom, ER ;
Thibeault, BJ ;
Coldren, LA .
ELECTRONICS LETTERS, 1997, 33 (04) :300-301
[33]   FABRICATION OF MULTIPLE WAVELENGTH LASERS IN GAAS-ALGAAS STRUCTURES USING A ONE-STEP SPATIALLY CONTROLLED QUANTUM-WELL INTERMIXING TECHNIQUE [J].
OOI, BS ;
AYLING, SG ;
BRYCE, AC ;
MARSH, JH .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (09) :944-946
[34]   MODELING TEMPERATURE EFFECTS AND SPATIAL HOLE-BURNING TO OPTIMIZE VERTICAL-CAVITY SURFACE-EMITTING LASER PERFORMANCE [J].
SCOTT, JW ;
GEELS, RS ;
CORZINE, SW ;
COLDREN, LA .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1993, 29 (05) :1295-1308
[35]   HIGH-EFFICIENCY SUBMILLIAMP VERTICAL-CAVITY LASERS WITH INTRACAVITY CONTACTS [J].
SCOTT, JW ;
THIBEAULT, BJ ;
YOUNG, DB ;
COLDREN, LA ;
PETERS, FH .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (06) :678-680
[36]  
Strand TA, 1997, J APPL PHYS, V81, P3377, DOI 10.1063/1.365032
[37]   LOW REGROWTH-INTERFACE RECOMBINATION RATES IN INGAAS-GAAS BURIED RIDGE LASERS FABRICATED BY IN-SITU PROCESSING [J].
STRAND, TA ;
THIBEAULT, BJ ;
MUI, DSL ;
COLDREN, LA ;
PETROFF, PM ;
HU, EL .
APPLIED PHYSICS LETTERS, 1995, 66 (15) :1966-1968
[38]   Formation of GaAs quantum well islands by thermal desorption using an AlAs mask [J].
Strand, TA ;
Naone, RL ;
Coldren, LA ;
Hu, EL .
SURFACE SCIENCE, 1996, 359 (1-3) :L456-L460
[39]   TE/TM MODE SELECTIVE CHANNEL WAVEGUIDES IN GAAS/ALAS SUPERLATTICE FABRICATED BY SIO2 CAP DISORDERING [J].
SUZUKI, Y ;
IWAMURA, H ;
MIKAMI, O .
APPLIED PHYSICS LETTERS, 1990, 56 (01) :19-20
[40]   Reduced optical scattering loss in vertical-cavity lasers using a thin (300 angstrom) oxide aperture [J].
Thibeault, BJ ;
Hegblom, ER ;
Floyd, PD ;
Naone, R ;
Akulova, Y ;
Coldren, LA .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (05) :593-595