Raman spectroscopy of ultrathin strained-silicon-on-insulator: Size effects in strain, elastic, and phonon properties

被引:9
作者
Poborchii, Vladimir [1 ]
Hara, Mikiya [1 ]
Morita, Yukinori [1 ]
Tada, Tetsuya [1 ]
机构
[1] AIST, Nanoelect Res Inst, Tsukuba, Ibaraki 3058562, Japan
关键词
STRESS;
D O I
10.1063/1.4914031
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using linearized radial polarization of the incident 364 nm light, we obtained Raman spectra of strained-Si-on-insulator (SSOI) with a clear domination of the forbidden transverse (TO) phonon band over the allowed longitudinal (LO) phonon band. We observed an increase in the LO and TO phonon Raman band stress-induced downshifts and a decrease in their ratio with SSOI thinning down to similar to 10 nm, in-plane strain remaining nearly unchanged while off-plane compression decreasing by similar to 10% indicating a decrease in the Poisson's ratio. At SSOI thickness <10 nm, longitudinal optical phonon confinement and reduction of the confined phonon lifetime are observed. (C) 2015 AIP Publishing LLC.
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页数:4
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共 22 条
  • [1] Confined phonons in Si nanowires
    Adu, KW
    Gutiérrez, HR
    Kim, UJ
    Sumanasekera, GU
    Eklund, PC
    [J]. NANO LETTERS, 2005, 5 (03) : 409 - 414
  • [2] PIEZO-RAMAN MEASUREMENTS AND ANHARMONIC PARAMETERS IN SILICON AND DIAMOND
    ANASTASSAKIS, E
    CANTARERO, A
    CARDONA, M
    [J]. PHYSICAL REVIEW B, 1990, 41 (11): : 7529 - 7535
  • [3] THE EFFECTS OF MICROCRYSTAL SIZE AND SHAPE ON THE ONE PHONON RAMAN-SPECTRA OF CRYSTALLINE SEMICONDUCTORS
    CAMPBELL, IH
    FAUCHET, PM
    [J]. SOLID STATE COMMUNICATIONS, 1986, 58 (10) : 739 - 741
  • [4] DeWolf I, 1996, SEMICOND SCI TECH, V11, P139, DOI 10.1088/0268-1242/11/2/001
  • [5] Atomistic Simulations of Heat Transport in Silicon Nanowires
    Donadio, Davide
    Galli, Giulia
    [J]. PHYSICAL REVIEW LETTERS, 2009, 102 (19)
  • [6] Thickness dependence of nanofilm elastic modulus
    Fedorchenko, Alexander I.
    Wang, An-Bang
    Cheng, Henry H.
    [J]. APPLIED PHYSICS LETTERS, 2009, 94 (15)
  • [7] Microscopic Origin of the Reduced Thermal Conductivity of Silicon Nanowires
    He, Yuping
    Galli, Giulia
    [J]. PHYSICAL REVIEW LETTERS, 2012, 108 (21)
  • [8] What is the Young's Modulus of Silicon?
    Hopcroft, Matthew A.
    Nix, William D.
    Kenny, Thomas W.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 19 (02) : 229 - 238
  • [9] Mlayah A., 2007, LIGHT SCATTERING SOL
  • [10] Ultraviolet Raman spectra of few nanometer thick silicon-on-insulator nanofilms: Lifetime reduction of confined phonons
    Poborchii, Vladimir
    Morita, Yukinori
    Ishimaru, Manabu
    Tada, Tetsuya
    [J]. APPLIED PHYSICS LETTERS, 2014, 105 (15)