Characterizing porosity in nanoporous thin films using positronium annihilation lifetime spectroscopy

被引：24
|
作者：
Sun, JN [1 ]
Hu, YF [1 ]
Frieze, WE [1 ]
Gidley, DW [1 ]
机构：
[1] Univ Michigan, Dept Phys, Ann Arbor, MI 48109 USA
来源：
RADIATION PHYSICS AND CHEMISTRY | 2003年 / 68卷 / 3-4期
关键词：
PALS; porous films; low-k dielectric films;
D O I：
10.1016/S0969-806X(03)00182-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Depth profiled positronium annihilation lifetime spectroscopy (PALS) is an extremely useful probe of the pore characteristics of nanoporous thin films in general and low-dielectric constant (k) thin films in particular. PALS is sensitive to all pores (both closed and open) in the size range from 0.3 to similar to300 nm and to the closed-to-open pore transition. Deduced pore sizes have been extensively compared with other techniques in an ongoing round-robin with other laboratories. The application of PALS in issues related to Cu/low-k film microchip integration will be demonstrated. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码：345 / 349
页数：5
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