Polysilicon photonic resonators for large-scale 3D integration of optical networks

被引：80

作者：

Preston, Kyle ^{[1
]}

Schmidt, Bradley ^{[1
]}

Lipson, Michal ^{[1
]}

机构：

[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

来源：

OPTICS EXPRESS | 2007年 / 15卷 / 25期

关键词：

D O I：

10.1364/OE.15.017283

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate optical microresonators in polycrystalline silicon with quality factors of 20,000. We also demonstrate polycrystalline resonators vertically coupled to crystalline silicon waveguides. Electrically active photonic structures fabricated in deposited polysilicon layers would enable the large-scale integration of photonics with current CMOS microelectronics. (c) 2007 Optical Society of America.

引用

页码：17283 / 17290

页数：8

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