Positioning accuracy of primary mirror actuators for large aperture space based optical instruments

被引：0

作者：

Hatheway, AE ^{[1
]}

机构：

[1] Alson E Hatheway Inc, Pasadena, CA 91101 USA

来源：

CURRENT DEVELOPMENTS IN LENS DESIGN AND OPTICAL SYSTEMS ENGINEERING | 2000年 / 4093卷

关键词：

actuator; nanometer; space instruments; accuracy; move error;

D O I：

10.1117/12.405196

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper describes the Rubicon(tm) actuator, discusses its test data and derives from the data the actuator's accuracy function based upon the observed accuracy of long and short stroke motion commands. The accuracy is described in terms of the rms positioning error (in nanometers) for moves of a given size, regardless of position in the stroke.

引用

页码：107 / 114

页数：4